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Developments of TaN ALD Process for 3D Conformal Coatings:
Brizé, Virginie
;
Prieur, Thomas
;
Violet, Perrine
...
Chemical Vapor Deposition. 17 (2011) 10-12 - p. 284-295 , 2011
Link:
https://doi.org/10.1002/cvde.201100045
RT Journal T1
Developments of TaN ALD Process for 3D Conformal Coatings
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_cvde.201100045&Exemplar=1&LAN=DE A1 Brizé, Virginie A1 Prieur, Thomas A1 Violet, Perrine A1 Artaud, Laurent A1 Berthomé, Grégory A1 Blanquet, Elisabeth A1 Boichot, Raphaël A1 Coindeau, Stéphane A1 Doisneau, Béatrice A1 Farcy, Alexis A1 Mantoux, Arnaud A1 Nuta, Ioana A1 Pons, Michel A1 Volpi, Fabien PB Wiley YR 2011 SN 0948-1907 SN 1521-3862 JF Chemical Vapor Deposition VO 17 IS 10-12 SP 284 OP 295 LK http://dx.doi.org/https://doi.org/10.1002/cvde.201100045 DO https://doi.org/10.1002/cvde.201100045 SF ELIB - SuUB Bremen
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