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1 Ergebnisse
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Integrated hybrid MEMS hydrogen sensor with high sensitivit..:
Hayashi, Yumi
;
Yamazaki, Hiroaki
;
Masunishi, Kei
...
Electrical Engineering in Japan. 214 (2020) 2 - p. , 2020
Link:
https://doi.org/10.1002/eej.23317
RT Journal T1
Integrated hybrid MEMS hydrogen sensor with high sensitivity and high dynamic range
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_eej.23317&Exemplar=1&LAN=DE A1 Hayashi, Yumi A1 Yamazaki, Hiroaki A1 Masunishi, Kei A1 Ono, Daiki A1 Saito, Tomohiro A1 Nakamura, Naofumi A1 Kojima, Akihiro PB Wiley YR 2020 SN 0424-7760 SN 1520-6416 JF Electrical Engineering in Japan VO 214 IS 2 LK http://dx.doi.org/https://doi.org/10.1002/eej.23317 DO https://doi.org/10.1002/eej.23317 SF ELIB - SuUB Bremen
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