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Ruthenium(II) MOCVD Precursors for Phosphorus‐Doped Rutheni..:
Preuß, Andrea
;
Tamuliene, Jelena
;
Madajska, Katarzyna
...
European Journal of Inorganic Chemistry. 2020 (2020) 17 - p. 1612-1623 , 2020
Link:
https://doi.org/10.1002/ejic.201901310
RT Journal T1
Ruthenium(II) MOCVD Precursors for Phosphorus‐Doped Ruthenium Layer Formation
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_ejic.201901310&Exemplar=1&LAN=DE A1 Preuß, Andrea A1 Tamuliene, Jelena A1 Madajska, Katarzyna A1 Szymanska, Iwona B. A1 Korb, Marcus A1 Rüffer, Tobias A1 Jeschke, Janine A1 Melzer, Marcel A1 Bankwitz, Jörn A1 Schulz, Stefan E. A1 Lang, Heinrich PB Wiley YR 2020 SN 1434-1948 SN 1099-0682 JF European Journal of Inorganic Chemistry VO 2020 IS 17 SP 1612 OP 1623 LK http://dx.doi.org/https://doi.org/10.1002/ejic.201901310 DO https://doi.org/10.1002/ejic.201901310 SF ELIB - SuUB Bremen
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