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1 Ergebnisse
1
Patterning of Tailored Polycarbonate Based Non‐Chemically A..:
Yu, Anguang
;
Liu, Heping
;
Blinco, James P.
...
Macromolecular Rapid Communications. 31 (2010) 16 - p. 1449-1455 , 2010
Link:
https://doi.org/10.1002/marc.201000117
RT Journal T1 <Title>Patterning of Tailored Polycarbonate Based Non‐Chemically Amplified Resists Using Extreme Ultraviolet Lithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_marc.201000117&Exemplar=1&LAN=DE A1 Yu, Anguang A1 Liu, Heping A1 Blinco, James P. A1 Jack, Kevin S. A1 Leeson, Michael A1 Younkin, Todd R. A1 Whittaker, Andrew K. A1 Blakey, Idriss PB Wiley YR 2010 SN 1022-1336 SN 1521-3927 JF Macromolecular Rapid Communications VO 31 IS 16 SP 1449 OP 1455 LK http://dx.doi.org/https://doi.org/10.1002/marc.201000117 DO https://doi.org/10.1002/marc.201000117 SF ELIB - SuUB Bremen
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