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Herstellung von Zr(B,C,N)‐Schichten im DC‐Puls‐PACVD‐Prozeß:
Rie, K.‐T.
;
Gebauer, A.
;
Wöhle, J.
...
Materialwissenschaft und Werkstofftechnik. 24 (1993) 10 - p. 353-355 , 1993
Link:
https://doi.org/10.1002/mawe.19930241003
RT Journal T1 <Title>Herstellung von Zr(B,C,N)‐Schichten im DC‐Puls‐PACVD‐Prozeß</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_mawe.19930241003&Exemplar=1&LAN=DE A1 Rie, K.‐T. A1 Gebauer, A. A1 Wöhle, J. A1 Erker, Gerhard A1 Sarter, Christian A1 Fritze, Cornelia PB Wiley YR 1993 SN 0933-5137 SN 1521-4052 JF Materialwissenschaft und Werkstofftechnik VO 24 IS 10 SP 353 OP 355 LK http://dx.doi.org/https://doi.org/10.1002/mawe.19930241003 DO https://doi.org/10.1002/mawe.19930241003 SF ELIB - SuUB Bremen
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