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Design and fabrication of integrated film bulk acoustic res..:
Park, Jae Yoeng
;
Lee, Hee Chul
;
Cheon, Seong Jong
Microwave and Optical Technology Letters. 48 (2006) 11 - p. 2230-2233 , 2006
Link:
https://doi.org/10.1002/mop.21905
RT Journal T1 <Title>Design and fabrication of integrated film bulk acoustic resonator and filter on silicon nitride membrane</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_mop.21905&Exemplar=1&LAN=DE A1 Park, Jae Yoeng A1 Lee, Hee Chul A1 Cheon, Seong Jong PB Wiley YR 2006 SN 0895-2477 SN 1098-2760 JF Microwave and Optical Technology Letters VO 48 IS 11 SP 2230 OP 2233 LK http://dx.doi.org/https://doi.org/10.1002/mop.21905 DO https://doi.org/10.1002/mop.21905 SF ELIB - SuUB Bremen
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