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Deposition of intrinsic hydrogenated amorphous silicon for ..:

Zimmermann, T. ; Flikweert, A. J. ; Merdzhanova, T....
Progress in Photovoltaics: Research and Applications.  22 (2012)  2 - p. 198-207 , 2012
Link: https://doi.org/10.1002/pip.2254