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Excellent ONO passivation on phosphorus and boron diffusion..:

Kho, Teng Choon ; Fong, Kean Chern ; Stocks, Matthew...
Progress in Photovoltaics: Research and Applications.  28 (2020)  10 - p. 1034-1044 , 2020
Link: https://doi.org/10.1002/pip.3310