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1 Ergebnisse
1
Low‐Pressure Plasma After‐Treatment of Pollutants Emitted D..:
Hur, Min
;
Lee, Jae Ok
;
Kang, Woo Seok
.
Plasma Processes and Polymers. 12 (2015) 6 - p. 583-593 , 2015
Link:
https://doi.org/10.1002/ppap.201500046
RT Journal T1
Low‐Pressure Plasma After‐Treatment of Pollutants Emitted During Semiconductor Manufacturing
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_ppap.201500046&Exemplar=1&LAN=DE A1 Hur, Min A1 Lee, Jae Ok A1 Kang, Woo Seok A1 Song, Young‐Hoon PB Wiley YR 2015 SN 1612-8850 SN 1612-8869 JF Plasma Processes and Polymers VO 12 IS 6 SP 583 OP 593 LK http://dx.doi.org/https://doi.org/10.1002/ppap.201500046 DO https://doi.org/10.1002/ppap.201500046 SF ELIB - SuUB Bremen
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