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1 Ergebnisse
1
Effect of temperature and incident ion energy on nanostruct..:
Thompson, Matt
;
Shi, Quan
;
Kajita, Shin
..
Plasma Processes and Polymers. 17 (2020) 12 - p. , 2020
Link:
https://doi.org/10.1002/ppap.202000126
RT Journal T1
Effect of temperature and incident ion energy on nanostructure formation on silicon exposed to helium plasma
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_ppap.202000126&Exemplar=1&LAN=DE A1 Thompson, Matt A1 Shi, Quan A1 Kajita, Shin A1 Ohno, Noriyasu A1 Corr, Cormac PB Wiley YR 2020 SN 1612-8850 SN 1612-8869 JF Plasma Processes and Polymers VO 17 IS 12 LK http://dx.doi.org/https://doi.org/10.1002/ppap.202000126 DO https://doi.org/10.1002/ppap.202000126 SF ELIB - SuUB Bremen
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