I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Noble gas effect on ACL etching selectivity to SiO2 films:
Choi, Gilyoung
;
Efremov, Alexander
;
Son, Hye Jun
.
Plasma Processes and Polymers. 20 (2023) 8 - p. , 2023
Link:
https://doi.org/10.1002/ppap.202300026
RT Journal T1
Noble gas effect on ACL etching selectivity to SiO2 films
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_ppap.202300026&Exemplar=1&LAN=DE A1 Choi, Gilyoung A1 Efremov, Alexander A1 Son, Hye Jun A1 Kwon, Kwang‐Ho PB Wiley YR 2023 SN 1612-8850 SN 1612-8869 JF Plasma Processes and Polymers VO 20 IS 8 LK http://dx.doi.org/https://doi.org/10.1002/ppap.202300026 DO https://doi.org/10.1002/ppap.202300026 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)