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1 Ergebnisse
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In situ excimer laser irradiation as cleaning tool for soli..:
Höger, Ingmar
;
Schmidt, Thomas
;
Landgraf, Anja
...
physica status solidi (a). 210 (2013) 12 - p. 2729-2735 , 2013
Link:
https://doi.org/10.1002/pssa.201330056
RT Journal T1
In situ excimer laser irradiation as cleaning tool for solid phase epitaxy of laser crystallized polycrystalline silicon thin films
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_pssa.201330056&Exemplar=1&LAN=DE A1 Höger, Ingmar A1 Schmidt, Thomas A1 Landgraf, Anja A1 Schade, Martin A1 Gawlik, Annett A1 Andrä, Gudrun A1 Leipner, Hartmut S. A1 Falk, Fritz PB Wiley YR 2013 SN 1862-6300 JF physica status solidi (a) VO 210 IS 12 SP 2729 OP 2735 LK http://dx.doi.org/https://doi.org/10.1002/pssa.201330056 DO https://doi.org/10.1002/pssa.201330056 SF ELIB - SuUB Bremen
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