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The annealing effect on work function variation of WNxCy fi..:
Kim, Hyunjung
;
Jang, Woochool
;
Shin, Changhee
...
physica status solidi (a). 214 (2017) 7 - p. , 2017
Link:
https://doi.org/10.1002/pssa.201700010
RT Journal T1
The annealing effect on work function variation of WNxCy films deposited by remote plasma atomic layer deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_pssa.201700010&Exemplar=1&LAN=DE A1 Kim, Hyunjung A1 Jang, Woochool A1 Shin, Changhee A1 Lee, Kunyoung A1 Lim, Heewoo A1 Kim, Manseok A1 Yuh, Junhan A1 Jeon, Hyeongtag PB Wiley YR 2017 SN 1862-6300 SN 1862-6319 JF physica status solidi (a) VO 214 IS 7 LK http://dx.doi.org/https://doi.org/10.1002/pssa.201700010 DO https://doi.org/10.1002/pssa.201700010 SF ELIB - SuUB Bremen
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