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Impact of Plasma‐Damaged‐Layer Removal on GaN HEMT Devices:
Kodera, Masako
;
Yoshioka, Akira
;
Sugiyama, Toru
...
physica status solidi (a). 215 (2017) 9 - p. , 2017
Link:
https://doi.org/10.1002/pssa.201700633
RT Journal T1
Impact of Plasma‐Damaged‐Layer Removal on GaN HEMT Devices
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_pssa.201700633&Exemplar=1&LAN=DE A1 Kodera, Masako A1 Yoshioka, Akira A1 Sugiyama, Toru A1 Ohguro, Tatsuya A1 Hamamoto, Takeshi A1 Kawamoto, Tatsuyoshi A1 Yamanaka, Tatsuya A1 Xinyu, Zhang A1 Lester, Steve A1 Miyashita, Naoto PB Wiley YR 2017 SN 1862-6300 SN 1862-6319 JF physica status solidi (a) VO 215 IS 9 LK http://dx.doi.org/https://doi.org/10.1002/pssa.201700633 DO https://doi.org/10.1002/pssa.201700633 SF ELIB - SuUB Bremen
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