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1 Ergebnisse
1
Boron nitride films prepared by RF sputtering:
Yasuda, K.
;
Yoshida, A.
;
Takeda, M.
..
physica status solidi (a). 90 (1985) 1 - p. K7-K9 , 1985
Link:
https://doi.org/10.1002/pssa.2210900146
RT Journal T1 <Title>Boron nitride films prepared by RF sputtering</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_pssa.2210900146&Exemplar=1&LAN=DE A1 Yasuda, K. A1 Yoshida, A. A1 Takeda, M. A1 Masuda, H. A1 Akasaki, I. PB Wiley YR 1985 SN 0031-8965 SN 1521-396X JF physica status solidi (a) VO 90 IS 1 SP K7 OP K9 LK http://dx.doi.org/https://doi.org/10.1002/pssa.2210900146 DO https://doi.org/10.1002/pssa.2210900146 SF ELIB - SuUB Bremen
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