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1 Ergebnisse
1
Comparison of SiNx Dielectric Layer Grown by Plasma‐Enhance..:
Sun, Haolun
;
Wu, Mei
;
Wang, Ping
...
physica status solidi (b). , 2024
Link:
https://doi.org/10.1002/pssb.202400052
RT Journal T1 <Title>Comparison of SiNx Dielectric Layer Grown by Plasma‐Enhanced Chemical Vapor Deposition, Low‐Pressure Chemical Vapor Deposition, and Metal‐Organic Chemical Vapor Deposition in Diamond‐ and GaN‐Based Integrated Devices</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_pssb.202400052&Exemplar=1&LAN=DE A1 Sun, Haolun A1 Wu, Mei A1 Wang, Ping A1 Yuan, Chao A1 Ma, Guoliang A1 Yang, Ling A1 Ma, Xiaohua A1 Hao, Yue PB Wiley YR 2024 SN 0370-1972 SN 1521-3951 JF physica status solidi (b) LK http://dx.doi.org/https://doi.org/10.1002/pssb.202400052 DO https://doi.org/10.1002/pssb.202400052 SF ELIB - SuUB Bremen
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