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An Advanced Qualitative Model Regarding the Role of Oxygen ..:
Li, Hongzhao
;
Ma, Fa-Jun
;
Hameiri, Ziv
..
physica status solidi (RRL) - Rapid Research Letters. 11 (2017) 9 - p. 1700046 , 2017
Link:
https://doi.org/10.1002/pssr.201700046
RT Journal T1 <Title>An Advanced Qualitative Model Regarding the Role of Oxygen During POCl3 Diffusion in Silicon</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_pssr.201700046&Exemplar=1&LAN=DE A1 Li, Hongzhao A1 Ma, Fa-Jun A1 Hameiri, Ziv A1 Wenham, Stuart A1 Abbott, Malcolm PB Wiley YR 2017 SN 1862-6254 JF physica status solidi (RRL) - Rapid Research Letters VO 11 IS 9 SP 1700046 LK http://dx.doi.org/https://doi.org/10.1002/pssr.201700046 DO https://doi.org/10.1002/pssr.201700046 SF ELIB - SuUB Bremen
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