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Controlling the Electrical Characteristics of ZrO2/Al2O3/Zr..:
An, Cheol Hyun
;
Lee, Woongkyu
;
Kim, Sang Hyeon
...
physica status solidi (RRL) – Rapid Research Letters. 13 (2018) 3 - p. , 2018
Link:
https://doi.org/10.1002/pssr.201800454
RT Journal T1 <Title>Controlling the Electrical Characteristics of ZrO2/Al2O3/ZrO2 Capacitors by Adopting a Ru Top Electrode Grown via Atomic Layer Deposition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_pssr.201800454&Exemplar=1&LAN=DE A1 An, Cheol Hyun A1 Lee, Woongkyu A1 Kim, Sang Hyeon A1 Cho, Cheol Jin A1 Kim, Dong‐Gun A1 Kwon, Dae Seon A1 Cho, Seong Tak A1 Cha, Soon Hyung A1 Lim, Jun Il A1 Jeon, Woojin A1 Hwang, Cheol Seong PB Wiley YR 2018 SN 1862-6254 SN 1862-6270 JF physica status solidi (RRL) – Rapid Research Letters VO 13 IS 3 LK http://dx.doi.org/https://doi.org/10.1002/pssr.201800454 DO https://doi.org/10.1002/pssr.201800454 SF ELIB - SuUB Bremen
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