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1 Ergebnisse
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Effect of Hydrogen on Hafnium Zirconium Oxide Fabricated by..:
Kim, Hyoungkyu
;
Yun, Seokjung
;
Kim, Tae Ho
...
physica status solidi (RRL) – Rapid Research Letters. 15 (2021) 5 - p. , 2021
Link:
https://doi.org/10.1002/pssr.202100020
RT Journal T1 <Title>Effect of Hydrogen on Hafnium Zirconium Oxide Fabricated by Atomic Layer Deposition Using H2O2 Oxidant</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_pssr.202100020&Exemplar=1&LAN=DE A1 Kim, Hyoungkyu A1 Yun, Seokjung A1 Kim, Tae Ho A1 Kim, Hoon A1 Bae, Changdeuck A1 Jeon, Sanghun A1 Hong, Seungbum PB Wiley YR 2021 SN 1862-6254 SN 1862-6270 JF physica status solidi (RRL) – Rapid Research Letters VO 15 IS 5 LK http://dx.doi.org/https://doi.org/10.1002/pssr.202100020 DO https://doi.org/10.1002/pssr.202100020 SF ELIB - SuUB Bremen
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