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Variability in measurements of micro lengths with a white l..:
Ferri, Carlo
;
Brousseau, Emmanuel
Quality and Reliability Engineering International. 24 (2008) 8 - p. 881-890 , 2008
Link:
https://doi.org/10.1002/qre.903
RT Journal T1 <Title>Variability in measurements of micro lengths with a white light interferometer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_qre.903&Exemplar=1&LAN=DE A1 Ferri, Carlo A1 Brousseau, Emmanuel PB Wiley YR 2008 SN 0748-8017 SN 1099-1638 JF Quality and Reliability Engineering International VO 24 IS 8 SP 881 OP 890 LK http://dx.doi.org/https://doi.org/10.1002/qre.903 DO https://doi.org/10.1002/qre.903 SF ELIB - SuUB Bremen
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