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P‐19: Effect of RTP Annealing Using UV and DUV Light on the..:
Nam, Yunyong
;
Yang, Jong-Heon
;
Jeong, Pilseong
...
SID Symposium Digest of Technical Papers. 49 (2018) 1 - p. 1249-1251 , 2018
Link:
https://doi.org/10.1002/sdtp.12137
RT Journal T1 <Title>P‐19: Effect of RTP Annealing Using UV and DUV Light on the Properties of the Al‐IZTO TFTs</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.12137&Exemplar=1&LAN=DE A1 Nam, Yunyong A1 Yang, Jong-Heon A1 Jeong, Pilseong A1 Kwon, Oh-Sang A1 Pi, Jae-Eun A1 Kim, Hee-Ok A1 Cho, Sung Haeng A1 Hwang, Chi-Sun A1 Ji, Sanghyun A1 Park, Sang-Hee Ko PB Wiley YR 2018 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 49 IS 1 SP 1249 OP 1251 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.12137 DO https://doi.org/10.1002/sdtp.12137 SF ELIB - SuUB Bremen
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