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1 Ergebnisse
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P‐77: Area‐Selective Atomic Layer Deposition Using Inkjet‐p..:
Cho, Young-In
;
Yu, Jun-Ho
;
Yoon, Dai Geon
...
SID Symposium Digest of Technical Papers. 49 (2018) 1 - p. 1478-1481 , 2018
Link:
https://doi.org/10.1002/sdtp.12232
RT Journal T1 <Title>P‐77: Area‐Selective Atomic Layer Deposition Using Inkjet‐printed Fluorocarbon Patterns as Mask Layers</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.12232&Exemplar=1&LAN=DE A1 Cho, Young-In A1 Yu, Jun-Ho A1 Yoon, Dai Geon A1 Park, Jin-Goo A1 Choi, Kyung Hyun A1 Lee, Sang-Ho PB Wiley YR 2018 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 49 IS 1 SP 1478 OP 1481 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.12232 DO https://doi.org/10.1002/sdtp.12232 SF ELIB - SuUB Bremen
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