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76‐2: Fine Glass Masks (FGMs) for OLED Manufacturing Made b..:
Dunker, Daniel
;
Ostholt, Roman
;
Delrue, Jean-Pol
SID Symposium Digest of Technical Papers. 50 (2019) 1 - p. 1083-1086 , 2019
Link:
https://doi.org/10.1002/sdtp.13116
RT Journal T1 <Title>76‐2: Fine Glass Masks (FGMs) for OLED Manufacturing Made by Laser Induced Deep Etching (LIDE)</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.13116&Exemplar=1&LAN=DE A1 Dunker, Daniel A1 Ostholt, Roman A1 Delrue, Jean-Pol PB Wiley YR 2019 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 50 IS 1 SP 1083 OP 1086 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.13116 DO https://doi.org/10.1002/sdtp.13116 SF ELIB - SuUB Bremen
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