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1 Ergebnisse
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9‐1: Fabrication of Lateral Crystal Si on Cu Bottom‐Gate St..:
Toriyama, Seiya
;
Kosugi, Junichi
;
Kosuge, Takanori
...
SID Symposium Digest of Technical Papers. 52 (2021) 1 - p. 96-98 , 2021
Link:
https://doi.org/10.1002/sdtp.14619
RT Journal T1
9‐1: Fabrication of Lateral Crystal Si on Cu Bottom‐Gate Structure via Blue‐Laser Diode Annealing (BLDA)
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.14619&Exemplar=1&LAN=DE A1 Toriyama, Seiya A1 Kosugi, Junichi A1 Kosuge, Takanori A1 Saito, Kaori A1 Sawai,, Takuya A1 Yingbao, Yang A1 Sasaki, Nobuo A1 Gotoh, Jun A1 Sugimoto, Shigeto PB Wiley YR 2021 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 52 IS 1 SP 96 OP 98 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.14619 DO https://doi.org/10.1002/sdtp.14619 SF ELIB - SuUB Bremen
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