I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
55‐3: Development of Low‐Temperature Metal Dry‐Etching Equi..:
Kim, Chiwoo
;
Jung, Jae Hoon
;
Jang, Jin Nyoung
...
SID Symposium Digest of Technical Papers. 53 (2022) 1 - p. 729-732 , 2022
Link:
https://doi.org/10.1002/sdtp.15593
RT Journal T1 <Title>55‐3: Development of Low‐Temperature Metal Dry‐Etching Equipment via ECR Plasma Source</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.15593&Exemplar=1&LAN=DE A1 Kim, Chiwoo A1 Jung, Jae Hoon A1 Jang, Jin Nyoung A1 Lee, Jong Hwa A1 Jung, Kiro A1 Yoon, Ho-Won A1 Lee, Sangheon A1 Kim, Donghoon A1 Hong, Mun-Pyo A1 Kim, Sang-Gab A1 Jang, Soo Ouk PB Wiley YR 2022 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 53 IS 1 SP 729 OP 732 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.15593 DO https://doi.org/10.1002/sdtp.15593 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
