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41.3:Invited Paper:Molybdenum Titanium based Sputter Target..:
Hotz, Hendrik
;
Schmidt, Hennrik
;
Lorenz, Dominik
...
SID Symposium Digest of Technical Papers. 53 (2022) S1 - p. 432-433 , 2022
Link:
https://doi.org/10.1002/sdtp.15974
RT Journal T1 <Title>41.3:Invited Paper:Molybdenum Titanium based Sputter Targets for TFT Application</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.15974&Exemplar=1&LAN=DE A1 Hotz, Hendrik A1 Schmidt, Hennrik A1 Lorenz, Dominik A1 Scherer, Thomas A1 Linke, Christian A1 Koestenbauer, Harald A1 Winkler, Joerg PB Wiley YR 2022 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 53 IS S1 SP 432 OP 433 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.15974 DO https://doi.org/10.1002/sdtp.15974 SF ELIB - SuUB Bremen
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