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20.4: Activation of Doped Silicon Film Using Semiconductor ..:
Yang, Y.
;
Kinoshita, M.
;
Okuno, T.
...
SID Symposium Digest of Technical Papers. 54 (2023) S1 - p. 157-160 , 2023
Link:
https://doi.org/10.1002/sdtp.16251
RT Journal T1 <Title>20.4: Activation of Doped Silicon Film Using Semiconductor Blue Light Diode Laser Annealing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.16251&Exemplar=1&LAN=DE A1 Yang, Y. A1 Kinoshita, M. A1 Okuno, T. A1 Hashizume, M. A1 Saito, K. A1 Sawai, T. A1 Gotoh, J. A1 Sugimoto, S. PB Wiley YR 2023 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 54 IS S1 SP 157 OP 160 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.16251 DO https://doi.org/10.1002/sdtp.16251 SF ELIB - SuUB Bremen
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