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1 Ergebnisse
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P‐7.5: Analysis and research on the improvement of OPC comp..:
ZHONG, Guoqiang
;
TANG, Wenhao
;
ZHANG, Ran
...
SID Symposium Digest of Technical Papers. 54 (2023) S1 - p. 712-714 , 2023
Link:
https://doi.org/10.1002/sdtp.16392
RT Journal T1 <Title>P‐7.5: Analysis and research on the improvement of OPC compensation aperture ratio</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.16392&Exemplar=1&LAN=DE A1 ZHONG, Guoqiang A1 TANG, Wenhao A1 ZHANG, Ran A1 WANG, Yongcan A1 WANG, Zhangtao A1 SHAO, Xibin A1 CHEN, Jian A1 SHI, Shenwei A1 LIU, Zhenyi PB Wiley YR 2023 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 54 IS S1 SP 712 OP 714 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.16392 DO https://doi.org/10.1002/sdtp.16392 SF ELIB - SuUB Bremen
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