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48‐1: Invited Paper: Oxide Semiconductor Thin‐Film Transist..:
Sung, Chihun
;
Nam, Sooji
;
Cho, Sung Haeng
SID Symposium Digest of Technical Papers. 54 (2023) 1 - p. 692-694 , 2023
Link:
https://doi.org/10.1002/sdtp.16653
RT Journal T1 <Title>48‐1: Invited Paper: Oxide Semiconductor Thin‐Film Transistors with Deep Submicron Channel Fabricated with Hyperlithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.16653&Exemplar=1&LAN=DE A1 Sung, Chihun A1 Nam, Sooji A1 Cho, Sung Haeng PB Wiley YR 2023 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 54 IS 1 SP 692 OP 694 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.16653 DO https://doi.org/10.1002/sdtp.16653 SF ELIB - SuUB Bremen
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