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1 Ergebnisse
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P‐8: Synthesis of Superior‐Performance InGaZnO Based on Ide..:
Kim, Yoon-Seo
;
Oh, Hye-Jin
;
Kim, Junghwan
..
SID Symposium Digest of Technical Papers. 54 (2023) 1 - p. 1806-1809 , 2023
Link:
https://doi.org/10.1002/sdtp.16956
RT Journal T1 <Title>P‐8: Synthesis of Superior‐Performance InGaZnO Based on Ideal Reaction of Plasma Enhanced Atomic Layer Deposition†</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.16956&Exemplar=1&LAN=DE A1 Kim, Yoon-Seo A1 Oh, Hye-Jin A1 Kim, Junghwan A1 Lim, Jun Hyung A1 Park, Jin-Seong PB Wiley YR 2023 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 54 IS 1 SP 1806 OP 1809 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.16956 DO https://doi.org/10.1002/sdtp.16956 SF ELIB - SuUB Bremen
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