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1 Ergebnisse
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10‐3: Self‐aligned top‐gate amorphous ITZO TFTs with high‐k..:
Jiang, Wei
;
Wong, Man
SID Symposium Digest of Technical Papers. 55 (2024) S1 - p. 95-97 , 2024
Link:
https://doi.org/10.1002/sdtp.17006
RT Journal T1 <Title>10‐3: Self‐aligned top‐gate amorphous ITZO TFTs with high‐k AlOx insulator with Oxygen‐plasma formed source/drain</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.17006&Exemplar=1&LAN=DE A1 Jiang, Wei A1 Wong, Man PB Wiley YR 2024 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 55 IS S1 SP 95 OP 97 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.17006 DO https://doi.org/10.1002/sdtp.17006 SF ELIB - SuUB Bremen
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