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1 Ergebnisse
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P‐7.8: Resistance Reduction in Molybdenum gate electrode by..:
Gao, Zecui
;
Koestenbauer, Harald
;
Lorenz, Dominik
...
SID Symposium Digest of Technical Papers. 55 (2024) S1 - p. 1076-1076 , 2024
Link:
https://doi.org/10.1002/sdtp.17281
RT Journal T1 <Title>P‐7.8: Resistance Reduction in Molybdenum gate electrode by W Seed Layer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.17281&Exemplar=1&LAN=DE A1 Gao, Zecui A1 Koestenbauer, Harald A1 Lorenz, Dominik A1 Linke, Christian A1 Winkler, Joerg A1 Schmidt, Hennrik PB Wiley YR 2024 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 55 IS S1 SP 1076 OP 1076 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.17281 DO https://doi.org/10.1002/sdtp.17281 SF ELIB - SuUB Bremen
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