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1 Ergebnisse
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P‐11.8: GaN‐Based Micro‐LED Sidewall Defect Reduction via P..:
Liu, Zhaoyong
;
Ren, Kailin
;
Liu, Yibo
...
SID Symposium Digest of Technical Papers. 55 (2024) S1 - p. 1312-1314 , 2024
Link:
https://doi.org/10.1002/sdtp.17350
RT Journal T1 <Title>P‐11.8: GaN‐Based Micro‐LED Sidewall Defect Reduction via Plasma Pre‐Treatment and Atomic Layer Deposition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.17350&Exemplar=1&LAN=DE A1 Liu, Zhaoyong A1 Ren, Kailin A1 Liu, Yibo A1 Feng, Feng A1 Li, Zichun A1 Liu, Zhaojun A1 Kwok, Hoi-Sing A1 Zhang, Jianhua PB Wiley YR 2024 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 55 IS S1 SP 1312 OP 1314 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.17350 DO https://doi.org/10.1002/sdtp.17350 SF ELIB - SuUB Bremen
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