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Paper No 19.3: Back‐Channel‐Etch Process Flow for a‐IGZO TF..:
Nag, Manoj
;
Steudel, Soeren
;
Chasin, Adrian
...
SID Symposium Digest of Technical Papers. 44 (2013) S1 - p. 285-288 , 2013
Link:
https://doi.org/10.1002/sdtp.83
RT Journal T1 <Title>Paper No 19.3: Back‐Channel‐Etch Process Flow for a‐IGZO TFTs</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sdtp.83&Exemplar=1&LAN=DE A1 Nag, Manoj A1 Steudel, Soeren A1 Chasin, Adrian A1 Myny, Kris A1 Rockele, Maarten A1 Bhoolokam, Ajay A1 Willegems, Myriam A1 Smout, Steve A1 Vicca, Peter A1 Ameys, Marc A1 Schols, Sarah A1 Cheyns, David A1 Genoe, Jan A1 van der Steen, Jan‐Laurens A1 Tempelaars, Karin A1 Groeseneken, Guido A1 Heremans, Paul PB Wiley YR 2013 SN 0097-966X SN 2168-0159 JF SID Symposium Digest of Technical Papers VO 44 IS S1 SP 285 OP 288 LK http://dx.doi.org/https://doi.org/10.1002/sdtp.83 DO https://doi.org/10.1002/sdtp.83 SF ELIB - SuUB Bremen
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