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1 Ergebnisse
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Subnanometre depth resolution in sputter depth profiling of..:
Lee, Hyung‐Ik
;
Kim, Hyun Kyong
;
Kim, Kyung Joong
...
Surface and Interface Analysis. 36 (2004) 3 - p. 259-263 , 2004
Link:
https://doi.org/10.1002/sia.1683
RT Journal T1
Subnanometre depth resolution in sputter depth profiling of Si layers using grazing‐incident low‐energy O2+ and Ar+ ions
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sia.1683&Exemplar=1&LAN=DE A1 Lee, Hyung‐Ik A1 Kim, Hyun Kyong A1 Kim, Kyung Joong A1 Moon, Dae Won A1 Shon, Hyun Kyung A1 Shin, Hye Chung A1 Kang, Hee Jae PB Wiley YR 2004 SN 0142-2421 SN 1096-9918 JF Surface and Interface Analysis VO 36 IS 3 SP 259 OP 263 LK http://dx.doi.org/https://doi.org/10.1002/sia.1683 DO https://doi.org/10.1002/sia.1683 SF ELIB - SuUB Bremen
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