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Characterisation of metal oxide films deposited by non-hydr..:
Evans, P. J.
;
Mutin, P. H.
;
Triani, G.
..
Surface and Interface Analysis. 38 (2006) 4 - p. 740-743 , 2006
Link:
https://doi.org/10.1002/sia.2305
RT Journal T1 <Title>Characterisation of metal oxide films deposited by non-hydrolytic ALD</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sia.2305&Exemplar=1&LAN=DE A1 Evans, P. J. A1 Mutin, P. H. A1 Triani, G. A1 Prince, K. E. A1 Bartlett, J. R. PB Wiley YR 2006 SN 0142-2421 SN 1096-9918 JF Surface and Interface Analysis VO 38 IS 4 SP 740 OP 743 LK http://dx.doi.org/https://doi.org/10.1002/sia.2305 DO https://doi.org/10.1002/sia.2305 SF ELIB - SuUB Bremen
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