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XPS composition study of stacked Si oxide/Si nitride/Si oxi..:
Ravizza, E.
;
Spadoni, S.
;
Piagge, R.
..
Surface and Interface Analysis. 44 (2012) 8 - p. 1209-1213 , 2012
Link:
https://doi.org/10.1002/sia.4943
RT Journal T1 <Title>XPS composition study of stacked Si oxide/Si nitride/Si oxide nano‐layers</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sia.4943&Exemplar=1&LAN=DE A1 Ravizza, E. A1 Spadoni, S. A1 Piagge, R. A1 Comite, P. A1 Wiemer, C. PB Wiley YR 2012 SN 0142-2421 SN 1096-9918 JF Surface and Interface Analysis VO 44 IS 8 SP 1209 OP 1213 LK http://dx.doi.org/https://doi.org/10.1002/sia.4943 DO https://doi.org/10.1002/sia.4943 SF ELIB - SuUB Bremen
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