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Summary of ISO/TC 201 Technical Report: ISO/TR 19319:2013 –..:
Senoner, M.
;
Unger, W. E. S.
Surface and Interface Analysis. 45 (2013) 9 - p. 1313-1316 , 2013
Link:
https://doi.org/10.1002/sia.5294
RT Journal T1 <Title>Summary of ISO/TC 201 Technical Report: ISO/TR 19319:2013 – Surface chemical analysis – Fundamental approaches to determination of lateral resolution and sharpness in beam‐based methods</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sia.5294&Exemplar=1&LAN=DE A1 Senoner, M. A1 Unger, W. E. S. PB Wiley YR 2013 SN 0142-2421 SN 1096-9918 JF Surface and Interface Analysis VO 45 IS 9 SP 1313 OP 1316 LK http://dx.doi.org/https://doi.org/10.1002/sia.5294 DO https://doi.org/10.1002/sia.5294 SF ELIB - SuUB Bremen
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