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1 Ergebnisse
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Low temperature plasma for the preparation of crater walls ..:
Muramoto, Shin
;
Bennett, Joe
Surface and Interface Analysis. 49 (2016) 6 - p. 515-521 , 2016
Link:
https://doi.org/10.1002/sia.6187
RT Journal T1 <Title>Low temperature plasma for the preparation of crater walls for compositional depth profiling of thin inorganic multilayers: Low temperature plasma of inorganic multilayers</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sia.6187&Exemplar=1&LAN=DE A1 Muramoto, Shin A1 Bennett, Joe PB Wiley YR 2016 SN 0142-2421 JF Surface and Interface Analysis VO 49 IS 6 SP 515 OP 521 LK http://dx.doi.org/https://doi.org/10.1002/sia.6187 DO https://doi.org/10.1002/sia.6187 SF ELIB - SuUB Bremen
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