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Effect of hydrogen on the chemical state, stoichiometry and..:
Cancellieri, Claudia
;
Gramatte, Simon
;
Politano, Olivier
...
Surface and Interface Analysis. 56 (2024) 5 - p. 293-304 , 2024
Link:
https://doi.org/10.1002/sia.7282
RT Journal T1
Effect of hydrogen on the chemical state, stoichiometry and density of amorphous Al2O3 films grown by thermal atomic layer deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_sia.7282&Exemplar=1&LAN=DE A1 Cancellieri, Claudia A1 Gramatte, Simon A1 Politano, Olivier A1 Lapeyre, Léo A1 Klimashin, Fedor F. A1 Mackosz, Krzysztof A1 Utke, Ivo A1 Novotny, Zbynek A1 Müller, Arnold M. A1 Vockenhuber, Christof A1 Turlo, Vladyslav A1 Jeurgens, Lars P. H. PB Wiley YR 2024 SN 0142-2421 SN 1096-9918 JF Surface and Interface Analysis VO 56 IS 5 SP 293 OP 304 LK http://dx.doi.org/https://doi.org/10.1002/sia.7282 DO https://doi.org/10.1002/sia.7282 SF ELIB - SuUB Bremen
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