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Self‐Formation of a Ru/ZnO Multifunctional Bilayer for the ..:
Mori, Yuki
;
Cheon, Taehoon
;
Kotsugi, Yohei
...
Small. 19 (2023) 34 - p. , 2023
Link:
https://doi.org/10.1002/smll.202300290
RT Journal T1
Self‐Formation of a Ru/ZnO Multifunctional Bilayer for the Next‐Generation Interconnect Technology via Area‐Selective Atomic Layer Deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_smll.202300290&Exemplar=1&LAN=DE A1 Mori, Yuki A1 Cheon, Taehoon A1 Kotsugi, Yohei A1 Kim, Youn‐Hye A1 Park, Yejin A1 Ansari, Mohd Zahid A1 Mohapatra, Debananda A1 Jang, Yujin A1 Bae, Jong‐Seong A1 Kwon, Woobin A1 Kim, Gahui A1 Park, Young‐Bae A1 Lee, Han‐Bo‐Ram A1 Song, Wooseok A1 Kim, Soo‐Hyun PB Wiley YR 2023 SN 1613-6810 SN 1613-6829 JF Small VO 19 IS 34 LK http://dx.doi.org/https://doi.org/10.1002/smll.202300290 DO https://doi.org/10.1002/smll.202300290 SF ELIB - SuUB Bremen
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