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Fabrication of a microelectromechanical system mirror array..:
Sakata, Tomomi
;
Usui, Mitsuo
;
Uchiyama, Shingo
...
IEEJ Transactions on Electrical and Electronic Engineering. 6 (2011) 4 - p. 384-389 , 2011
Link:
https://doi.org/10.1002/tee.20672
RT Journal T1 <Title>Fabrication of a microelectromechanical system mirror array and its drive electrodes for low electrical interference in wavelength‐selective switches</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_tee.20672&Exemplar=1&LAN=DE A1 Sakata, Tomomi A1 Usui, Mitsuo A1 Uchiyama, Shingo A1 Shimoyama, Nobuhiro A1 Kodate, Junichi A1 Ishii, Hiromu A1 Matsuura, Tohru A1 Shimokawa, Fusao A1 Sato, Yasuhiro PB Wiley YR 2011 SN 1931-4973 SN 1931-4981 JF IEEJ Transactions on Electrical and Electronic Engineering VO 6 IS 4 SP 384 OP 389 LK http://dx.doi.org/https://doi.org/10.1002/tee.20672 DO https://doi.org/10.1002/tee.20672 SF ELIB - SuUB Bremen
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