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Integration of (Poly‐Si/Air)n Distributed Bragg Reflectors ..:
Helke, Christian
;
Seiler, Jan
;
Meinig, Marco
...
IEEJ Transactions on Electrical and Electronic Engineering. 19 (2023) 5 - p. 767-772 , 2023
Link:
https://doi.org/10.1002/tee.23960
RT Journal T1 <Title>Integration of (Poly‐Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer‐Level MOEMS Fabrication Process</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_tee.23960&Exemplar=1&LAN=DE A1 Helke, Christian A1 Seiler, Jan A1 Meinig, Marco A1 Großmann, Toni Dirk A1 Bonitz, Jens A1 Haase, Micha A1 Zimmermann, Sven A1 Ebermann, Martin A1 Kurth, Steffen A1 Reuter, Danny A1 Hiller, Karla PB Wiley YR 2023 SN 1931-4973 SN 1931-4981 JF IEEJ Transactions on Electrical and Electronic Engineering VO 19 IS 5 SP 767 OP 772 LK http://dx.doi.org/https://doi.org/10.1002/tee.23960 DO https://doi.org/10.1002/tee.23960 SF ELIB - SuUB Bremen
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