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1 Ergebnisse
1
Deep Reactive Etching of Silica with SF6/H2 Plasma: Variati..:
Salehi, Maryam
;
Rad, Ghasem Amraee
;
Hafezi, Fatemeh
..
Vakuum in Forschung und Praxis. 33 (2021) 2 - p. 40-44 , 2021
Link:
https://doi.org/10.1002/vipr.202100756
RT Journal T1
Deep Reactive Etching of Silica with SF6/H2 Plasma: Variation of process parameters and microstructural studies
UL https://suche.suub.uni-bremen.de/peid=cr-10.1002_vipr.202100756&Exemplar=1&LAN=DE A1 Salehi, Maryam A1 Rad, Ghasem Amraee A1 Hafezi, Fatemeh A1 Arman, Ali A1 Bonjakhi, Mohsen PB Wiley YR 2021 SN 0947-076X SN 1522-2454 JF Vakuum in Forschung und Praxis VO 33 IS 2 SP 40 OP 44 LK http://dx.doi.org/https://doi.org/10.1002/vipr.202100756 DO https://doi.org/10.1002/vipr.202100756 SF ELIB - SuUB Bremen
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