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Advantages of Using Piezoelectric Materials in the MEMS Con..:

, In: Advances in Intelligent Systems and Computing; Mechatronics 2019: Recent Advances Towards Industry 4.0,
Ekwińska, Magdalena A. ; Zając, Jerzy ; Szmigiel, Dariusz... - p. 265-273 , 2019
Link: https://doi.org/10.1007/978-3-030-29993-4_33