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Integration of Two-Dimensional MEMS Ultrasonic Transducer A..:

, In: Lecture Notes in Electrical Engineering; Sensors and Microsystems,
Savoia, Alessandro S. ; Mauti, Barbara ; Caliano, Giosuè - p. 177-182 , 2020
Link: https://doi.org/10.1007/978-3-030-37558-4_26