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A Digital Twin for MEMS and NEMS:

, In: Springer Handbook of Semiconductor Devices; Springer Handbooks,
Korvink, Jan G. ; Poletkin, Kirill V. ; Deng, Yongbo. - p. 1303-1334 , 2022
Link: https://doi.org/10.1007/978-3-030-79827-7_36