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1 Ergebnisse
1
Micromirrors:
, In:
Silicon Sensors and Actuators
,
Carminati, Roberto
;
Costantini, Sonia
- p. 565-601 , 2022
Link:
https://doi.org/10.1007/978-3-030-80135-9_18
RT T1 <cTitle>Silicon Sensors and Actuators</cTitle>: T1 <Title>Micromirrors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_978-3-030-80135-9_18&Exemplar=1&LAN=DE A1 Carminati, Roberto A1 Costantini, Sonia PB Springer International Publishing YR 2022 SP 565 OP 601 LK http://dx.doi.org/https://doi.org/10.1007/978-3-030-80135-9_18 DO https://doi.org/10.1007/978-3-030-80135-9_18 SF ELIB - SuUB Bremen
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