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1 Ergebnisse
1
Deep Silicon Etch:
, In:
Silicon Sensors and Actuators
,
Alessandri, Anna
;
D'Ercoli, Filippo
;
Petruzza, Pietro
. - p. 133-167 , 2022
Link:
https://doi.org/10.1007/978-3-030-80135-9_5
RT T1 <cTitle>Silicon Sensors and Actuators</cTitle>: T1 <Title>Deep Silicon Etch</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_978-3-030-80135-9_5&Exemplar=1&LAN=DE A1 Alessandri, Anna A1 D'Ercoli, Filippo A1 Petruzza, Pietro A1 Sciutti, Alessandra PB Springer International Publishing YR 2022 SP 133 OP 167 LK http://dx.doi.org/https://doi.org/10.1007/978-3-030-80135-9_5 DO https://doi.org/10.1007/978-3-030-80135-9_5 SF ELIB - SuUB Bremen
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