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Numerical Simulation of CVD Reactor for Oxide Semiconductor..:
, In:
Springer Proceedings in Physics; International Youth Conference on Electronics, Telecommunications and Information Technologies
,
Kleimanov, Roman
;
Korshunov, Andrey
;
Kondrateva, Anastasia
... - p. 229-234 , 2022
Link:
https://doi.org/10.1007/978-3-030-81119-8_24
RT T1 <cTitle>Springer Proceedings in Physics; International Youth Conference on Electronics, Telecommunications and Information Technologies</cTitle>: T1 <Title>Numerical Simulation of CVD Reactor for Oxide Semiconductor Layer Deposition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1007_978-3-030-81119-8_24&Exemplar=1&LAN=DE A1 Kleimanov, Roman A1 Korshunov, Andrey A1 Kondrateva, Anastasia A1 Karaseov, Platon A1 Mishin, Maxim A1 Enns, Yakov A1 Komarevtsev, Ivan PB Springer International Publishing YR 2022 SP 229 OP 234 LK http://dx.doi.org/https://doi.org/10.1007/978-3-030-81119-8_24 DO https://doi.org/10.1007/978-3-030-81119-8_24 SF ELIB - SuUB Bremen
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